{"issue":"3","publication_status":"published","publication":"Optics Express","abstract":[{"text":"We fabricate and characterize a microscale silicon opto-electromechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental ωm=2π = 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion.","lang":"eng"}],"doi":"10.1364/OE.23.003196","author":[{"last_name":"Pitanti","full_name":"Pitanti, Alessandro","first_name":"Alessandro"},{"full_name":"Johannes Fink","first_name":"Johannes M","orcid":"0000-0001-8112-028X","last_name":"Fink","id":"4B591CBA-F248-11E8-B48F-1D18A9856A87"},{"full_name":"Safavi-Naeini, Amir H","first_name":"Amir","last_name":"Safavi Naeini"},{"first_name":"Jeff","full_name":"Hill, Jeff T","last_name":"Hill"},{"last_name":"Lei","full_name":"Lei, Chan U","first_name":"Chan"},{"last_name":"Tredicucci","first_name":"Alessandro","full_name":"Tredicucci, Alessandro"},{"first_name":"Oskar","full_name":"Painter, Oskar J","last_name":"Painter"}],"_id":"1788","title":"Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity","quality_controlled":0,"intvolume":"        23","volume":23,"date_updated":"2021-01-12T06:53:12Z","publist_id":"5325","type":"journal_article","extern":1,"date_published":"2015-02-09T00:00:00Z","page":"3196 - 3208","status":"public","year":"2015","publisher":"Optical Society of America","day":"09","citation":{"short":"A. Pitanti, J.M. Fink, A. Safavi Naeini, J. Hill, C. Lei, A. Tredicucci, O. Painter, Optics Express 23 (2015) 3196–3208.","mla":"Pitanti, Alessandro, et al. “Strong Opto-Electro-Mechanical Coupling in a Silicon Photonic Crystal Cavity.” <i>Optics Express</i>, vol. 23, no. 3, Optical Society of America, 2015, pp. 3196–208, doi:<a href=\"https://doi.org/10.1364/OE.23.003196\">10.1364/OE.23.003196</a>.","ama":"Pitanti A, Fink JM, Safavi Naeini A, et al. Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity. <i>Optics Express</i>. 2015;23(3):3196-3208. doi:<a href=\"https://doi.org/10.1364/OE.23.003196\">10.1364/OE.23.003196</a>","ieee":"A. Pitanti <i>et al.</i>, “Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity,” <i>Optics Express</i>, vol. 23, no. 3. Optical Society of America, pp. 3196–3208, 2015.","chicago":"Pitanti, Alessandro, Johannes M Fink, Amir Safavi Naeini, Jeff Hill, Chan Lei, Alessandro Tredicucci, and Oskar Painter. “Strong Opto-Electro-Mechanical Coupling in a Silicon Photonic Crystal Cavity.” <i>Optics Express</i>. Optical Society of America, 2015. <a href=\"https://doi.org/10.1364/OE.23.003196\">https://doi.org/10.1364/OE.23.003196</a>.","ista":"Pitanti A, Fink JM, Safavi Naeini A, Hill J, Lei C, Tredicucci A, Painter O. 2015. Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity. Optics Express. 23(3), 3196–3208.","apa":"Pitanti, A., Fink, J. M., Safavi Naeini, A., Hill, J., Lei, C., Tredicucci, A., &#38; Painter, O. (2015). Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity. <i>Optics Express</i>. Optical Society of America. <a href=\"https://doi.org/10.1364/OE.23.003196\">https://doi.org/10.1364/OE.23.003196</a>"},"date_created":"2018-12-11T11:54:01Z","month":"02","acknowledgement":"This work was supported by the DARPA MESO program, the AFOSR Hybrid Nanophotonics MURI, the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center with support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. AP gratefully acknowledge funding from EU through Marie Curie Actions, project NEMO (GA 298861). AT acknowledges partial financial support from the ERC through the advanced grant SoulMan"}